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| Artikel-Nr.: 5667A-9783319795393 Herst.-Nr.: 9783319795393 EAN/GTIN: 9783319795393 |
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| This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries. Weitere Informationen: | | Author: | Changhai Ru; Xinyu Liu; Yu Sun | Verlag: | Springer International Publishing | Sprache: | eng |
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| Weitere Suchbegriffe: allgemeine technikbücher - englischsprachig, Flexure-Guided Nanopositioning, MEMS Nanopositioning, Nanomanipulation, Nanopositioning Applications, Nanopositoning Technologies, Nanopostioning, Piezoelectric Actuation, Piezoelectric Nanopositioning, Tracking Control for Nanopositioning |
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